Supercritical Fluid System
Special Supercritical Process
Product summary Information
Configured and specified according to purposes such as cleaning, synthesis, plating, and painting
Key Features
Accurate equipment implementation | Custom engineering | High safety
Application
Used for semiconductor cleaning, micro-machine cleaning, SCORR, synthesis of ultra-fine polymers, supercritical plating, and dyeing processes
Custom orders are also possible for conditions other than the standard specifications, so please consult with your sales representative.
Supercritical Cleaning System
Supercritical Cleaning
– Easily penetrates fine pore structures
– Diffusion coefficient more than ten times that of liquids
– Environmentally friendly cleaning that is harmless to the environment and human health
– Cleaning possible even with liquid state carbon dioxide
※ After wet cleaning, pattern damage ⇒ After supercritical carbon dioxide cleaning
| Series | Supercritical Cleaning |
|---|---|
| Cleaning Vessel | 1.5L x 1unit / Max. Working Condition : 550kg/cm2 at 80℃ |
| Separate Vessel | 1L x 1unit |
| CO2 High Pressure Pump | Max. Flow Rate : 1L/min |
| Agitator | Magnedrive (Bottom) |
| Pressure Regulating | Electric Control Pressure Regulator |
| Pre-Heater & Heating System | Inline Double Pipe Type |
| Condenser & Cooling System | Shell & Tube Type |
| Control System | PC & Electric Local Type |
Supercritical Synthesis System
Supercritical Synthesis
– Used for polymerization of fluoropolymers and synthesis of ultra-fine polymers
– Depending on the situation, small amounts of oxygen or peroxides are injected with the raw materials
– Maintained at 250°C, where polymer ethylene dissolves in supercritical ethylene and is discharged
– Pressure reduced to 350bar in the separator for recovery and discharge
| Series | Supercritical Synthesis |
|---|---|
| Cleaning Vessel | 0.3L x 1unit / Max. Working Condition : 550kg/cm2 at 80℃ |
| Separate Vessel | 0.3L x 2unit |
| CO2 Storage Vessel | 5L x 1unit |
| CO2 High Pressure Pump | Max. Flow Rate : 70L/min |
| Agitator | Magnedrive (Top) |
| Co-Solvent Pump & System | Max. Flow Rate : 12mL/min |
| Recycle System | Filtering System |
| Temperature Utility | Chiller & Heating Bath System |
| Control System | Touch Panel Type |
Supercritical Plating System
Supercritical Plating
– Plating possible on metal components and plastics (ABS, PS)
– An environmentally friendly method that does not produce wastewater
| Series | Supercritical Plating |
|---|---|
| Main Vessel | 0.3L x 1unit / Max. Working Condition : 550kg/cm2 at 80℃ |
| Separate Vessel | 0.3L x 2unit |
| CO2 Storage Vessel | 5L x 1unit |
| CO2 High Pressure Pump | Max. Flow Rate : 70mL/min |
| Agitator | Magnedrive (Top) |
| Co-Solvent Pump & System | Max. Flow Rate : 12mL/min |
| Recycle System | Filtering System |
| Temperature Utility | Chiller & Heating Bath System |
| Control System | Touch Panel Type |
Supercritical Painting System
Supercritical Painting
– Mixing paint using supercritical carbon dioxide
– Composed of creation, transport, mixing, supply, and paint spray nozzle devices
| Series | Supercritical Painting |
|---|---|
| Main Vessel | 0.5L x 1unit / Max. Working Condition : 200kg/cm2 at 95℃ |
| Mixing Vessel | 0.3L x 1unit / Inserted Zirconia Ball Type |
| Static Mixer | 0.5L x 1unit / Paint + scCO2 Mixing |
| CO2 Gas Booster System | 5L x 1unit |
| Co-Solvent Pump & System | Max. Flow Rate : 12mL/min |
| Recycle System | Filtering System |
| Temperature Utility | Chiller & Heating Bath System |
| Control System | Electric Box Type |
